Thermal Mass Flow Module SEC-Z700S Series
offers users improved accuracy and an operating range from 0.5% to 100% of full scale. Also, by applying a command signal, the response time can be adjusted anywhere from 300ms to one second, enabling a new level of process control.
HORIBAs Liquid Source Vaporizers can vaporize liquid materials stably and efficiently. Our vaporizers can also be linked to HORIBAs range of automatic refill systems to provide safe and continuous delivery of vapor to the point of use. There is no downtime as bulk precursor tanks can be exchanged without interrupting the manufacturing process.
Helps Eliminate Errors
Less Workplace Violations
Longer Equipment Life
Lower Lubrication Costs
Less Product Downtime
Lower Maintenance Costs
Oil Recirculation -Customised System
Design of Tank Size & Technical Specifications are as per the customers requirement
Tank Size available from 40L up to 2000L
Centraline Gear Pump from 15LPM up to 200LPM
Oil cooler available in plate, shell & tube type
Oil filtration inline 24 micron
System is skid mounted
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