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Liquid Source Vaporization System

Liquid Source Vaporization System

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Product Description

HORIBA isone of the leading providers of high performance vaporizers. HORIBA’s liquidsource vaporizers are used throughout the semiconductor manufacturing processto safely and efficiently deliver liquid precursors in gas phase to the pointof use. Wherever a liquid precursor requires vaporizing in vacuum oratmospheric pressure, HORIBA have a vaporizing technique to offer a vaporizerto meet your requirements. HORIBA have more than 30 years vaporizing knowhowusing direct injection, mixed injection, bubbling and baking vaporizationtechniques.

HORIBA’s Liquid Source Vaporizers can vaporizeliquid materials stably and efficiently. Our vaporizers can also be linked toHORIBA’s range of automatic refill systems to provide safe and continuousdelivery of vapor to the point of use. There is no downtime as bulk precursortanks can be exchanged without interrupting the manufacturing process.
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